Design Method for Functional Components of Ultra High Precision Machines
Year: 2007
Author: Lotz, Markus; Höhne, Günter; Hackel, Tobias; Frank, Thomas; Theska, René
Series: ICED
Section: Theories and methodologies
Page(s): 755-756 (exec. Summ.), full paper no. DS42_P_198
Keywords: Design method, virtual prototyping, ultra high precision machines, stage mirror